LIQUID DELIVERY
Gas / Temperature / Humidity / Electronic Loads / Pressure
Overview
Mass flow control of up to two independent liquids per module
Flow rates up to 10 LPM
Multiple channels provide dynamic stochiometric mixing
Integrated safety: check valves, pressure regulators, purge lines, redundant software or hardwired interlock controls
Fully automated and remote control with Fideris Test Suite™ software
Quick swappable modules for zero downtime during service or calibration
Choose between the following configurations
Single-channel for one liquid stream
Single-channel for one liquid stream with extended range
Single-channel with a fail-safe, purge system (fixed or adjustable)
Dual-channel for two independent liquids
Liquid mixer for two independent liquids
Liquid divider to separate a single liquid into two outputs
Liquid selector to choose between up to six independent liquids
General Specifications
FLOW RATE RANGE¹ | 0.01 ccm - 10 LPM |
ACCURACY | ± 2% of full-scale |
REPEATABILITY | ± 2% of full-scale |
STEADY STATE CONTROL RANGE² | 2 - 100% of full-scale |
TYPICAL RESPONSE TIME | 100 ms |
LIQUID TEMPERATURE RANGE | -10 – 60°C (Non-freezing) |
²Lower % full-scale range achievable with extended range option
Back Panel Connections
POWER / RUN / STANDBY | Molex 39660-1004 |
DATA CONNECTIONS | Ethernet |
SUPPLY CONNECTION (Swagelok or quick connect) |
1U: 1/4” 2U: 3/8” |
OUTLET CONNECTION (Swagelok or quick connect) |
1U: 1/8” or 1/4" 2U: 3/8” |
PURGE CONNECTION (Swagelok or quick connect) | 1/4” |
Physical Characteristics
DIMENSIONS |
1U: 1.75” H x 19” W x 21” D 2U: 3.50” H x 19” W x 21” D |
SYSTEM WEIGHT |
1U: 19 lbs 2U: 25 lbs |
OPERATING CONDITIONS | 40-100°F; 0-85% RH non-condensing; indoor use only |
CLEARANCE FOR OPERATION | Front: 6”, Back: 6”, Sides: 0”, Top: 0” |