GAS DELIVERY
Overview
Mass flow control of up to two independent gases per module
Flow rates up to 5000 SLPM
Multiple channels provide dynamic stochiometric mixing
Integrated safety: check valves, pressure regulators, purge lines, redundant software, or hardwired interlock controls
Fully automated and remote control with Fideris Test Suite™ software
Quick swappable modules for zero downtime during service or calibration
Choose between the following configurations
Single-channel for one gas stream
Single-channel with a fail-safe, purge system (fixed or adjustable)
Dual-channel for two independent gases
Gas mixer for two independent gases
Gas divider to separate a gas stream into two outputs
Gas selector to choose between up to six independent gases
Controller Specifications
| Flow Rate Range¹ | 0.004 sccm – 5000 SLPM |
| Mass Flow Accuracy² | ± 0.6% of reading or ± 0.1% of full-scale, whichever is greater |
| Repeatability³ | ± 0.1% of reading + 0.02% of full-scale |
| Steady State Control Range | 0.01 - 100% of full-scale |
| Typical Response Time⁴ | 30 ms |
| Gas Temperature Range | -10-60°C |
| Temperature Accuracy | ± 0.75°C |
| Operating Pressure Range | 11.5 - 175 psia |
| Supply Gas Humidity Range | 0 - 95%, non-condensing |
| Sensor Response Time | < 1 ms |
¹Full-scale flow rate can be specified or calibrated at any level between 0.5 sccm - 5000 SLPM
²(0.8% of reading + 0.2% of full-scale) for 0.5-5 sccm and 26-5000 SLPM
³(0.2% of reading + 0.02% of full-scale) for 0.5-5 sccm and 26-5000 SLPM
⁴As fast as 100 ms for 0.5-5sccm (Depends on flow rate, user adjustable)
Back Panel Connections
| Power/ |
4 Position MTA |
| Data Connections | Ethernet |
| Supply Connection (Swagelok or quick connect) | 1U: 1/4” 2U: 3/8” |
| Outlet Connection (Swagelok or quick connect) | 1U: 1/8” or 1/4” 2U: 3/8” |
| Purge Connection (Swagelok or quick connect) | 1/4” |
| Control Air Connection (Instant Tube Fitting) | 1/8” |
Physical Characteristics
| Dimensions |
1U: 1.75” H x 19” W x 21” D 2U: 3.50” H x 19” W x 21” D |
| System Weight |
1U: 19 lbs 2U: 25 lbs |
| Operating Conditions | 40-100°F; 0-85% RH non-condensing; indoor use only |
| Clearance for Operation | Front: 6”, Back: 6", Sides: 0", Top: 0" |