GAS DELIVERY

Overview

Mass flow control of up to two independent gases per module

Flow rates up to 5000 SLPM

Multiple channels provide dynamic stochiometric mixing

Integrated safety: check valves, pressure regulators, purge lines, redundant software, or hardwired interlock controls

Fully automated and remote control with Fideris Test Suite™ software

Quick swappable modules for zero downtime during service or calibration

 

Choose between the following configurations

Single-channel for one gas stream

Single-channel with a fail-safe, purge system (fixed or adjustable)

Dual-channel for two independent gases

Gas mixer for two independent gases

Gas divider to separate a gas stream into two outputs

Gas selector to choose between up to six independent gases

Controller Specifications

Flow Rate Range¹ 0.004 sccm – 5000 SLPM
Mass Flow Accuracy² ± 0.6% of reading or ± 0.1% of full-scale, whichever is greater
Repeatability³ ± 0.1% of reading + 0.02% of full-scale
Steady State Control Range 0.01 - 100% of full-scale
Typical Response Time⁴ 30 ms
Gas Temperature Range -10-60°C
Temperature Accuracy ± 0.75°C
Operating Pressure Range 11.5 - 175 psia
Supply Gas Humidity Range 0 - 95%, non-condensing
Sensor Response Time < 1 ms

¹Full-scale flow rate can be specified or calibrated at any level between 0.5 sccm - 5000 SLPM
²(0.8% of reading + 0.2% of full-scale) for 0.5-5 sccm and 26-5000 SLPM
³(0.2% of reading + 0.02% of full-scale) for 0.5-5 sccm and 26-5000 SLPM
⁴As fast as 100 ms for 0.5-5sccm (Depends on flow rate, user adjustable)

 

Back Panel Connections

Power/Run/Standby 4 Position MTA
Data Connections Ethernet
Supply Connection (Swagelok or quick connect) 1U: 1/4”

2U: 3/8”
Outlet Connection (Swagelok or quick connect) 1U: 1/8” or 1/4”

2U: 3/8”
Purge Connection (Swagelok or quick connect) 1/4”
Control Air Connection (Instant Tube Fitting) 1/8”
 

Physical Characteristics

Dimensions 1U: 1.75” H x 19” W x 21” D

2U: 3.50” H x 19” W x 21” D
System Weight 1U: 19 lbs

2U: 25 lbs
Operating Conditions 40-100°F; 0-85% RH non-condensing; indoor use only
Clearance for Operation Front: 6”, Back: 6", Sides: 0", Top: 0"