Gas Delivery with Adjustable Purge Rate

Front Panel
Front Panel
Back Panel
Back Panel

  • Provides mass flow control of one gas and a fail-safe purge system with needle valve adjustable purge rate
  • Flow rates up to 2500 SLPM per gas
  • All-digital control eliminates analog calibration requirements and inaccuracies
  • Ethernet Interface for simple configuration and expansion!
  • The output from multiple Gas Delivery Modules may be combined to provide dynamically controlled gas flow rates and compositions, including Stoichiometric control
  • The output from multiple Gas Delivery Modules may be combined to provide dynamically controlled gas flow rates and compositions, including Stoichiometric control
  • Integrated hardwired Run/Standby signal 
  • Power Over Ethernet (PoE) for redundant power 
  • Front panel LED status of Ethernet communications, inlet gas pressure, gas enabled, and power
  • Pressure regulator on inlet gas lines to provide the highest degree of accuracy, and check valves for gas backflow prevention

Specifications

Specifications of the Gas Delivery Module with Adjustable Purge Rate
Mass flow control of one gas plus fail-safe operation of purge gas
Solenoid or pneumatically operated bubble tight valve
125 PSI (8.62 Bar)
All digitally controlled brands available including Alicat, Bronkhorst, Brooks, MKS, or Sierra
Fail-safe, normally open, solenoid valve or pneumatically operated valve
Flow rate controlled by front panel needle valve (optional readback mass flow meter)
Electrical Requirements
26-50VDC
Ethernet (DHCP)
Front Panel Controls and Displays
On, Disable, Auto
Manually adjustable valve
LCD with backlight, flow setpoint, and actual flow
Tx, Rx, Ident LEDs
LED illuminates above threshold pressure
Enabled LED
1 1/2" (optional)
Back Panel Connections
Molex 39660-1004
RJ45 (8P8C) Ethernet
Swagelok bulkhead union or optional quick-connect. 1/4" on 1U modules, 1/4" or 3/8" on 2U modules, 1/2" or 3/4" on 3U modules. VCR on optional UHP (Ultra-High Purity) models
Swagelok bulkhead union or optional quick-connect. 1/4" on 1U modules, 1/4" or 3/8" on 2U modules, 1/2" or 3/4" on 3U modules. VCR on optional UHP models
1/4" Swagelok bulkhead union or quick connect
Physical Characteristics
1U Modules: 1.75", 2U Modules: 3.5", 3U Modules: 5.25" 19" rackmount; 21" deep
Dependent on configuration,approximately 15 lbs for 1U
40F to 100F; 85% RH
Indoors
Back: 6", Sides: 0", Top: 0"

316L (VAR if a welded component). Surface finish 10 micro-inch Ra