Dual-Channel MFC Liquid Delivery

MFC Liquid Front
MFC Liquid Front
MFC Liquid Back
MFC Liquid Back

  • Separate inlets, liquid mass flow controllers, and outlets of two distinct liquids
  • All-digital control eliminates analog calibration requirements and inaccuracies
  • Ethernet Interface for simple configuration and expansion!
  • The output from multiple Liquid Delivery Modules may be combined to provide dynamically controlled gas flow rates and compositions, including Stoichiometric control
  • System-wide control of all FiderisTest System components using
  • Integrated hardwired Run/Standby signal
  • Power Over Ethernet (PoE) for redundant power
  • Front panel LED status of Ethernet communications, inlet liquid pressure, liquid enabled, and power
  • Pressure regulator on inlet liquid lines to provide the highest degree of accuracy, and check valves for liquid backflow prevention

Specifications

Specifications of the Dual-Channel MFC Liquid Delivery Module
Mass flow control of two separate liquids
Solenoid valve or pneumatically operated bubble tight valve
125 PSI (8.62 Bar)
All digitally controlled brands available including Alicat, Bronkhorst, Brooks, or Sierra
Electrical Requirements
26-50VDC
Ethernet (DHCP)
Front Panel Controls and Displays
LCD with backlight, flow setpoint, and actual flow
Tx, Rx, Ident LEDs
LED illuminates above threshold pressure
Enabled LED
1 1/2" (optional)
Back Panel Connections
Molex 39660-1004
RJ45 (8P8C) Ethernet
Swagelok bulkhead union or optional quick-connect. 1/4" on 1U modules, 1/4" or 3/8" on 2U modules, 1/2" or 3/4" on 3U modules. VCR on optional UHP (Ultra-High Purity) models
Swagelok bulkhead union or optional quick-connect. 1/4" on 1U modules, 1/4" or 3/8" on 2U modules, 1/2" or 3/4" on 3U modules. VCR on optional UHP models
Physical Characteristics
1U Modules: 1.75", 2U Modules: 3.5", 3U Modules: 5.25" 19" rackmount; 21" deep
Dependent on configuration,approximately 15 lbs for 1U
40 to 100 degrees Fahrenheit, 85% RH
Indoors
Back: 6", Sides: 0", Top: 0"