Alicat Gas Mass Flow Controllers

Alicat MFC Basic Display
Alicat MFC Basic Display
Standard Alicat MFC
Standard Alicat MFC

Alicat mass flow controllers are being used in processes like pharmaceutical and semiconductor manufacturing, fuel cell research, auto paint application, and emissions compliance equipment. Fideris customers receive up to 10% off MSRP on Alicat Mass Flow Controllers.

Features and Benefits of Alicat MC series mass flow controllers

Measured Parameters
MC, MCS, MCP, MCR & MCRS Series Mass Flow Controller products measure
  • Mass Flow
  • Volumetric Flow
  • Pressure (PSIA)
  • Temperature (° Celsius or ° Fahrenheit)


  • Pressure and temperature measurements are taken and displayed in the same unit, alleviating the need for additional measurement devices. (MC, MCP & MCR Series)
  • Mass flow controllers can be set by user to control pressure. It's like having two instruments in one. (MC, MCP & MCR Series)
  • MFCs can be tuned for application specific control
  • Multiple digital & analog inputs and outputs
  • Digital and analog input and output available on the same device
  • 100:1 Turndown ratio allows the MFC to measure flow at 1/100th of its full scale rating
  • 30-Gas Select on all units to reduce inventory costs
  • Control range from 1% to 100% of full scale flow
  • Tunable P & D to fine tune instrument's speed of response
  • Ideal instrument for a variety of processes, including: Fuel cell testing, vacuum coating, sputtering, process automation, semiconductor processing, micro electro mechanical (MEMs), solar cell manufacturing and flame tip control, to name a few.

30 factory installed, user selectable, gas calibrations on all Alicat mass flow controllers:

    • Air
    • Argon
    • Methane
    • Carbon Monoxide
    • Carbon Dioxide
    • Ethane
    • Hydrogen
    • Helium
    • Nitrogen
    • Nitrous Oxide
    • Neon
    • Oxygen
    • Propane
    • Butane
    • Acetylene
    • Ethylene
    • Iso-Butane
    • Krypton
    • Xenon
    • Sulfur Hexafluoride
    • 75% Argon + 25% CO2
    • 90% Argon + 10% CO2
    • 92% Argon + 8% CO2
    • 98% Argon + 2% CO2
    • 75% Argon + 25% Helium
    • 75% Helium + 25% Argon
    • 75% CO2 + 25% Argon
    • Helistar® A1025
    • Stargon® CS
    • 95% Argon + 5% CH4 


Corrosive/Aggressive gases compatible with Alicat MCS/MCRS series mass flow controllers:

  • Nitric Oxide to 100%
  • Nitrogen Triflouride to 100%
  • Ammonia to 100%
  • Hydrogen Sulfide to 100% (22C and under)
  • Propylene to 100%
  • Nitrogen Dioxide to 0.5% in an inert carrier
  • Refrigerant gases to 100%
  • Other gases to 1000PPM in an inert carrier


  • RS-232 output of all measured parameters
    • Optional RS-485 available
  • Optional PROFIBUS compatible communication standard
  • Optional DeviceNET compatible communication standard
  • Choice of analog output of main parameter
    • 0-5Vdc, 1-5Vdc, 0-10Vdc, or 4-20mA
  • Local Setpoint
  • RS-232 Setpoint
  • Choice of analog Setpoint Control
    • 0-5Vdc, 1-5Vdc, 0-10Vdc
    • 4-20mA available 


  • Alternate STPs for gas units
  • Lower pressure drops
  • Totalization
  • Gas blend calibrations
  • Alternate Units of Measure (SCFM, Kg/M, etc)
  • Downstream valve for vacuum applications
  • Locking 6-pin electrical connection
  • DB-15 connection
  • No Display Units for OEMs
  • Bi-directional flow
  • Alarm drivers
  • Class 1 Div 2 version available
  • ATEX Approved version available
  • Available with postive shut off valve. (MCV series) Ideal for high purity vacuum applications


Fideris customers receive up to 10% off MSRP on Alicat Mass Flow Controllers.

The MC series mass flow controller is very easy to use. No need for computers.

MFC Accuracy
High-accuracy calibration: +/-(0.4% of reading + 0.2% of full scale).
Standard calibrations: +/-(0.8% of reading + 0.2% of full scale).

Mass Flow Controller Repeatability
Alicat MFCs have very few moving parts leading to higher rates of consistency and repeatability. Alicat MC series mass flow controllers have a repeatability of +/-0.2% of FS.

Reduced Cost of Ownership
Alicat MC/MCP/MCR series flow controllers require very little power to run. MC and VC series flow controllers also have less pressure drop so more process fluids go into your process and not into your measurement devices. The MC series MFCs also measure pressure, temperature and volumetric flow in addition to mass flow which means fewer instruments you will have to buy and install.

Control Speed
Response time of less than 10ms.
Control time of 100ms.
One of the fastest naturally responding mass flow controllers on the market today.

Flow range: 0.5SCCM -2000SLPM. Multiple analog outputs and inputs. Adding a totalizer allows users to see how much media has flowed through the MFC, making it a great way to monit